Effect of Spin Coating Parameters on the Electrochemical Properties of Ruthenium Oxide Thin Films

Ruthenium oxide (RuOx) thin films were spin coated by thermal decomposition of alcoholic solutions RuCl3 on titanium foils and subsequently annealed at 400 °C. The effect coating parameters, such as spinning speed, volume, molar concentration the precursor well number deposits, morphology electrochemical performance electrodes was investigated. characterized scanning electron microscopy (SEM) equipped with energy-dispersive X-ray spectroscopy (EDX), cyclic voltammetry (CV) without chloride, linear sweep (LSV). prepared materials also compared to drop cast spin-coated obtained adopting low-temperature intermediate treatments. results indicate that even dispersion layer always achieved. By tuning it possible obtain different responses. most influential parameter is while salt rotation speed less relevant, under adopted conditions.